Silicon rich oxide with controlled mean size of silicon nanocrystals by deposition in multilayers

Quiroga, E., Bensch, W., Aceves, M., Yu, Z., Savy, Jean-Philippe, Haeckel, Matthias and Lechner, A. (2009) Silicon rich oxide with controlled mean size of silicon nanocrystals by deposition in multilayers [Talk] In: 10. International Conference on Ultimate Integration on Silicon Conference (ULIS) 2009, 18.-20.03, Aachen, Germany.

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Document Type: Conference or Workshop Item (Talk)
Research affiliation: OceanRep > GEOMAR
OceanRep > GEOMAR > FB2 Marine Biogeochemistry > FB2-MG Marine Geosystems
OceanRep > The Future Ocean - Cluster of Excellence
Refereed: No
DOI etc.: 10.1109/ULIS.2009.4897607
Projects: Future Ocean
Date Deposited: 26 Nov 2009 11:37
Last Modified: 06 Jul 2012 14:52
URI: http://eprints.uni-kiel.de/id/eprint/4103

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